A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (Q850043)
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scientific article; zbMATH DE number 5072589
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates |
scientific article; zbMATH DE number 5072589 |
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A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (English)
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15 November 2006
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thin films
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plasticity
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small-scale yielding
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strain hardening
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MEMS
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