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Analysis of a model for imaging in photolithography - MaRDI portal

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Analysis of a model for imaging in photolithography (Q909139)

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scientific article; zbMATH DE number 4136617
Language Label Description Also known as
English
Analysis of a model for imaging in photolithography
scientific article; zbMATH DE number 4136617

    Statements

    title
    Analysis of a model for imaging in photolithography (English)
    0 references
    author
    H. P. Urbach
    0 references
    publication date
    1989
    0 references
    zbMATH Keywords
    time dependent Maxwell equation
    0 references
    photolithography
    0 references
    limiting absorption principle
    0 references
    contraction mapping theorem
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    Identifiers

    zbMATH DE Number
    4136617
    0 references
     
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