Novel electrical characterization for advanced CMOS gate dielectrics (Q954418)
From MaRDI portal
| This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Novel electrical characterization for advanced CMOS gate dielectrics |
scientific article; zbMATH DE number 5363717
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Novel electrical characterization for advanced CMOS gate dielectrics |
scientific article; zbMATH DE number 5363717 |
Statements
Novel electrical characterization for advanced CMOS gate dielectrics (English)
0 references
10 November 2008
0 references
MOS device
0 references
gate dielectrics
0 references
electrical characterization
0 references
IETS
0 references
PASHEI
0 references
0.6220418810844421
0 references