Partly three-dimensional global modeling of a silicon Czochralski furnace. I: Principles, formulation and implementation of the model (Q978361)
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scientific article; zbMATH DE number 5725683
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Partly three-dimensional global modeling of a silicon Czochralski furnace. I: Principles, formulation and implementation of the model |
scientific article; zbMATH DE number 5725683 |
Statements
Partly three-dimensional global modeling of a silicon Czochralski furnace. I: Principles, formulation and implementation of the model (English)
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24 June 2010
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computer simulation
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global modeling
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Czochralski method
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radiation
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semiconducting silicon
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