Neural network reinforced point defect concentration estimation model for Czochralski-grown silicon crystals (Q988437)
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scientific article; zbMATH DE number 5775165
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Neural network reinforced point defect concentration estimation model for Czochralski-grown silicon crystals |
scientific article; zbMATH DE number 5775165 |
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Neural network reinforced point defect concentration estimation model for Czochralski-grown silicon crystals (English)
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26 August 2010
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Czochralski process
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silicon ingot
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point defect modeling
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