scientific article; zbMATH DE number 1353949

zbMATH Open1031.76559MaRDI QIDQ4268244

I. V. Shvejgert, M. I. Zhilyaev, V. A. Shvejgert

Publication date: 28 October 1999

Title of this publication is not available (Why is that?)

zbMATH Keywords

Monte Carlo methodhydrodynamic equationdeposition of thin films of hydrogenerated amorphous siliconelectron collision cross section for monosilaneplanar plasma-chemical reactor

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Chemical kinetics in thermodynamics and heat transfer (80A30) Ionized gas flow in electromagnetic fields; plasmic flow (76X05)

Related Items (2)

Title not available (Why is that?) ⋮ Simulation and model reduction methods for an RF plasma glow discharge

This page was built for publication:

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4268244)