scientific article; zbMATH DE number 1125117
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Publication:4379774
zbMATH Open0895.90110MaRDI QIDQ4379774
Publication date: 1 July 1998
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Production models (90B30) Models and methods for concurrent and distributed computing (process algebras, bisimulation, transition nets, etc.) (68Q85)
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Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing ⋮ Cost-constrained planning for concurrency satisfaction ⋮ Petri net models of flexible and automated manufacturing systems: a survey
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