Validation and evaluation for defect-kill-rate and yield estimation models in semiconductor manufacturing

DOI10.1080/00207540600677732zbMATH Open1128.90480OpenAlexW2003563788MaRDI QIDQ5444464

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Publication date: 25 February 2008

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540600677732

zbMATH Keywords

semiconductor manufacturingyield estimationkill rate of visual defectTaguchi's SN ratio

Mathematics Subject Classification ID

Production models (90B30)

Related Items (1)

Modeling and analyzing semiconductor yield with generalized linear mixed models

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