Pages that link to "Item:Q5925913"
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The following pages link to Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. (Q5925913):
Displaying 5 items.
- Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach (Q869631) (← links)
- Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook (Q2341393) (← links)
- Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing (Q2937836) (← links)
- Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework (Q3055360) (← links)
- Monotone convergence rate of norm-optimal-gain-arguable iterative learning control for LDTI systems (Q6578764) (← links)