Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing (Q2937836)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing |
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Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing (English)
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13 January 2015
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thermal budget control
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rapid thermal processing
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spike annealing
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