Pages that link to "Item:Q865134"
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The following pages link to On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale (Q865134):
Displaying 3 items.
- On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale (Q865134) (← links)
- A microsystem for the fracture characterization of polysilicon at the micro-scale (Q1949073) (← links)
- Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks (Q2439195) (← links)