On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale (Q865134)
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scientific article; zbMATH DE number 5125510
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale |
scientific article; zbMATH DE number 5125510 |
Statements
On-chip electrostatically actuated bending tests for the mechanical characterization of polysilicon at the micro scale (English)
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13 February 2007
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MEMS
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polysilicon
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mechanical properties
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Weibull statistics
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0.8373203
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0.81786454
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0.8136261
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0.8085555
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0.80589825
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0.80373883
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