Defect detection in patterned wafers using multichannel scanning electron microscope (Q1032454)
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scientific article; zbMATH DE number 5620511
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Defect detection in patterned wafers using multichannel scanning electron microscope |
scientific article; zbMATH DE number 5620511 |
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Defect detection in patterned wafers using multichannel scanning electron microscope (English)
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26 October 2009
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semiconductor defect detection
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anomaly detection
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anisotropic kernels
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image reconstruction
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similarity measure
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0.8694782
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0.8307792
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