Optimal control of the wafer temperatures in diffusion/LPCVD reactors (Q1194861)
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scientific article; zbMATH DE number 68717
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Optimal control of the wafer temperatures in diffusion/LPCVD reactors |
scientific article; zbMATH DE number 68717 |
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Optimal control of the wafer temperatures in diffusion/LPCVD reactors (English)
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6 October 1992
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