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Effects of aliasing errors on microlithographic image computations - MaRDI portal

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Effects of aliasing errors on microlithographic image computations (Q1387808)

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scientific article; zbMATH DE number 1160523
Language Label Description Also known as
English
Effects of aliasing errors on microlithographic image computations
scientific article; zbMATH DE number 1160523

    Statements

    title
    Effects of aliasing errors on microlithographic image computations (English)
    0 references
    author
    Uwe Hollerbach
    0 references
    publication date
    8 June 1998
    0 references
    zbMATH Keywords
    computational microelectronics
    0 references

    Identifiers

    zbMATH DE Number
    1160523
    0 references
    OpenAlex ID
    W153613268
    0 references
     
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