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Optimization of a horizontal MOCVD reactor for uniform epitaxial layer growth (Q1579279)

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scientific article; zbMATH DE number 1502298
Language Label Description Also known as
English
Optimization of a horizontal MOCVD reactor for uniform epitaxial layer growth
scientific article; zbMATH DE number 1502298

    Statements

    title
    Optimization of a horizontal MOCVD reactor for uniform epitaxial layer growth (English)
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    author
    N. Delaunay
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    publication date
    5 December 2001
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    zbMATH Keywords
    film uniformity
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    optimal reactor shape
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    reduced basis method
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    numerical optimization
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    horizontal metal-organic chemical vapor deposition reactor
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    sequential linear programming
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    Chebyshev polynomials
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    SIMPLE-type finite volume method
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    non-orthogonal grid
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    Identifiers

    Mathematics Subject Classification ID
    76D55
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    76M12
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    80M50
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    80A20
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    zbMATH DE Number
    1502298
    0 references
     
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