Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (Q1658038)
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scientific article; zbMATH DE number 6917542
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps |
scientific article; zbMATH DE number 6917542 |
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Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (English)
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14 August 2018
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MEMS sensors
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stiction
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contact model
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