Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (Q335195)
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scientific article; zbMATH DE number 6646762
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems |
scientific article; zbMATH DE number 6646762 |
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Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (English)
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2 November 2016
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MEMS
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micro-systems
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spontaneous adhesion
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stiction
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capillary forces
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Van der Waals forces
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rough surfaces
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FE simulations
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