BEM approaches and simplified kinetic models for the analysis of damping in deformable MEMS (Q1958325)
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scientific article; zbMATH DE number 5792837
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | BEM approaches and simplified kinetic models for the analysis of damping in deformable MEMS |
scientific article; zbMATH DE number 5792837 |
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BEM approaches and simplified kinetic models for the analysis of damping in deformable MEMS (English)
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28 September 2010
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multipole accelerators
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Stokes flow
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damping forces
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MEMS
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