Nonlinearity reduction in MEMS resonators based on design of H-shaped beams (Q2092977)
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scientific article; zbMATH DE number 7612110
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Nonlinearity reduction in MEMS resonators based on design of H-shaped beams |
scientific article; zbMATH DE number 7612110 |
Statements
Nonlinearity reduction in MEMS resonators based on design of H-shaped beams (English)
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4 November 2022
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electrically excited resonant system
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Rayleigh-Ritz energy method
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method of multiple scales
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nonlinear stiffness
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finite element method
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