Effect of improved tracking for atomic force microscope on piezo nonlinear behavior (Q2789980)
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scientific article; zbMATH DE number 6548773
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Effect of improved tracking for atomic force microscope on piezo nonlinear behavior |
scientific article; zbMATH DE number 6548773 |
Statements
2 March 2016
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nanotechnology
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atomic force microscope
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hysteresis
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creep
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cross-coupling
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model predictive control (MPC)
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vibration compensator
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Effect of improved tracking for atomic force microscope on piezo nonlinear behavior (English)
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