Self-oscillation loop design and measurement for an MEMS resonant accelerometer (Q2868147)
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scientific article; zbMATH DE number 6241963
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Self-oscillation loop design and measurement for an MEMS resonant accelerometer |
scientific article; zbMATH DE number 6241963 |
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Self-oscillation loop design and measurement for an MEMS resonant accelerometer (English)
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23 December 2013
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resonant accelerometer
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electrostatic stiffness
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self-sustained oscillation
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averaging method
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0.7582799196243286
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0.7445539236068726
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0.7179309129714966
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