A Variational Approach to the Inverse Photolithography Problem (Q3464945)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A Variational Approach to the Inverse Photolithography Problem |
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A Variational Approach to the Inverse Photolithography Problem (English)
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28 January 2016
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photolithograpy
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shape optimization
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inverse problem
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calculus of variations
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sets of finite perimeter
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\(\Gamma\)-convergence
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