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Design and synthesis of wide tuning range variable comb drive MEMS capacitors - MaRDI portal

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Design and synthesis of wide tuning range variable comb drive MEMS capacitors (Q3508813)

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scientific article
Language Label Description Also known as
English
Design and synthesis of wide tuning range variable comb drive MEMS capacitors
scientific article

    Statements

    title
    Design and synthesis of wide tuning range variable comb drive MEMS capacitors (English)
    0 references
    author
    Weijie Wan
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    David A. Lowther
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    publication date
    1 July 2008
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    Identifiers

    Mathematics Subject Classification ID
    78M50
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    78M10
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    78A55
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    zbMATH DE Number
    5295500
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    OpenAlex ID
    W1982075973
    0 references
     
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