A BEM technique for free-molecule flows in high frequency MEMS resonators (Q443447)
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scientific article; zbMATH DE number 6063802
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A BEM technique for free-molecule flows in high frequency MEMS resonators |
scientific article; zbMATH DE number 6063802 |
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A BEM technique for free-molecule flows in high frequency MEMS resonators (English)
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7 August 2012
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MEMS
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free-molecule flow
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dissipation
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