An Alternating Direction Method of Multipliers for Inverse Lithography Problem (Q6191763)
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scientific article; zbMATH DE number 7814755
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | An Alternating Direction Method of Multipliers for Inverse Lithography Problem |
scientific article; zbMATH DE number 7814755 |
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An Alternating Direction Method of Multipliers for Inverse Lithography Problem (English)
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11 March 2024
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inverse lithography techniques
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ADMM framework
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total variation regularization
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