Identification of spatial defects in semiconductor manufacturing (Q6579680)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Identification of spatial defects in semiconductor manufacturing |
scientific article; zbMATH DE number 7887743
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Identification of spatial defects in semiconductor manufacturing |
scientific article; zbMATH DE number 7887743 |
Statements
Identification of spatial defects in semiconductor manufacturing (English)
0 references
25 July 2024
0 references
alpha-shapes
0 references
integrated circuits fabrication
0 references
minimum spanning tree algorithm
0 references
\(p\)-value control charts
0 references
0 references
