Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology (Q6670697)
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scientific article; zbMATH DE number 7974266
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology |
scientific article; zbMATH DE number 7974266 |
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Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology (English)
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24 January 2025
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light scattering
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rigorous model
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electric field
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Maxwell's equation
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