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A continuum theory of multispecies thin solid film growth by chemical vapor deposition - MaRDI portal

A continuum theory of multispecies thin solid film growth by chemical vapor deposition (Q702330)

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scientific article; zbMATH DE number 2128651
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A continuum theory of multispecies thin solid film growth by chemical vapor deposition
scientific article; zbMATH DE number 2128651

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    A continuum theory of multispecies thin solid film growth by chemical vapor deposition (English)
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    17 January 2005
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    conservation laws
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    configurational force balance
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