Analytical solution for Polish-rate decay in chemical--mechanical polishing (Q718931)
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scientific article; zbMATH DE number 5950590
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Analytical solution for Polish-rate decay in chemical--mechanical polishing |
scientific article; zbMATH DE number 5950590 |
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Analytical solution for Polish-rate decay in chemical--mechanical polishing (English)
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27 September 2011
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polymer wear
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pad asperity
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