Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth (Q974546)

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scientific article; zbMATH DE number 5716711
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English
Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth
scientific article; zbMATH DE number 5716711

    Statements

    Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth (English)
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    3 June 2010
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    epitaxial growth of heterostructure
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    delta-doping
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    alternative approach of modeling
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