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Numerical study on photoresist etching processes based on a cellular automata model (Q1940807)

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scientific article; zbMATH DE number 6142939
Language Label Description Also known as
English
Numerical study on photoresist etching processes based on a cellular automata model
scientific article; zbMATH DE number 6142939

    Statements

    title
    Numerical study on photoresist etching processes based on a cellular automata model (English)
    0 references
    author
    Zaifa Zhou
    0 references
    Qingan Huang
    0 references
    Wei Lü
    0 references
    Weihua Li
    0 references
    publication date
    7 March 2013
    0 references
    zbMATH Keywords
    cellular automata
    0 references
    process simulation
    0 references
    optical lithography simulation
    0 references
    model
    0 references

    Identifiers

    Mathematics Subject Classification ID
    74E40
    0 references
    74S30
    0 references
    68Q80
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    zbMATH DE Number
    6142939
    0 references
    OpenAlex ID
    W1899462916
    0 references
     
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