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Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS - MaRDI portal

Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS (Q1958242)

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scientific article; zbMATH DE number 5792783
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English
Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS
scientific article; zbMATH DE number 5792783

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    Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS (English)
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    28 September 2010
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    boundary element methods
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    microelectromechanical systems
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    nanoelectromechanical systems
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    beams
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    nanotubes
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    modeling of ground
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