A 2-D model that accounts for 3-D fringing in MEMS devices (Q1958248)
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scientific article; zbMATH DE number 5792787
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A 2-D model that accounts for 3-D fringing in MEMS devices |
scientific article; zbMATH DE number 5792787 |
Statements
A 2-D model that accounts for 3-D fringing in MEMS devices (English)
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28 September 2010
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MEMS
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dimensional reduction
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fringing
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CAD
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0.8623325
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0.8482796
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0.84359384
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0.84139067
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0.8404811
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0.82510537
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0.8234277
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0.8208783
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