The quenching set of a MEMS capacitor in two-dimensional geometries (Q379914)
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scientific article; zbMATH DE number 6224834
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The quenching set of a MEMS capacitor in two-dimensional geometries |
scientific article; zbMATH DE number 6224834 |
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The quenching set of a MEMS capacitor in two-dimensional geometries (English)
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11 November 2013
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micro-electro-mechanical systems
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bi-Laplace equations
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nanotechnology
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quenching set
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