On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior (Q926864)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior |
scientific article; zbMATH DE number 5277636
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior |
scientific article; zbMATH DE number 5277636 |
Statements
On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior (English)
0 references
21 May 2008
0 references
pull-in voltage
0 references
MEMS
0 references
quenching profiles
0 references
self-similar
0 references
0 references
0 references
