A model for chemical-mechanical polishing of a material surface based on contact mechanics (Q597793)
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scientific article; zbMATH DE number 2082891
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A model for chemical-mechanical polishing of a material surface based on contact mechanics |
scientific article; zbMATH DE number 2082891 |
Statements
A model for chemical-mechanical polishing of a material surface based on contact mechanics (English)
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6 August 2004
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Wear and ablation
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Chemical mechanical polishing
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Contact mechanics
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0.87965316
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0.8670556
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0.86593467
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0.84346235
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0.84157586
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0.8336749
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0.8303262
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0.8172002
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0.8152145
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