Topology optimization for optical microlithography with partially coherent illumination (Q6565207)
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scientific article; zbMATH DE number 7874317
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Topology optimization for optical microlithography with partially coherent illumination |
scientific article; zbMATH DE number 7874317 |
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Topology optimization for optical microlithography with partially coherent illumination (English)
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1 July 2024
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topology optimization
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optical microlithography
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partially coherent illumination
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robust source and mask optimization
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MEMS
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