Multi-layer thin films/substrate system subjected to non-uniform misfit strains (Q837355)
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scientific article; zbMATH DE number 5602849
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Multi-layer thin films/substrate system subjected to non-uniform misfit strains |
scientific article; zbMATH DE number 5602849 |
Statements
Multi-layer thin films/substrate system subjected to non-uniform misfit strains (English)
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10 September 2009
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multi-layer thin films
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non-uniform misfit strain
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non-uniform wafer curvatures
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non-local stress-curvature relations
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interfacial shears
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